MULTI-DOF technology for positioning accuracy better than 200 nm
The accuracy of production equipment plays a vital role in the performance of the manufactured components, especially in the electronics and semiconductor manufacturing industry. The memory and computing capacity of today’s computer chips depend on ever greater accuracy in front-end and downstream back-end production processes, including hybrid bonding and advanced packaging.
WINGLET Software
How can you easily optimize highly complex motion systems? With the WINGLET software developed by ETEL. Whether during initial setup or for testing and readjustment when used in facilities for the production of semiconductors and electronic components, it ensures a perfect system setup for maximum performance.
CHARON2 HD and Z3TM+
Greater productivity and a higher degree of accuracy are made possible by the interplay of the highly dynamic CHARON2 HD motion system and the Z3TM+ module. This combination delivers motion control in six degrees of freedom and a special lifting mechanism for easier wafer handling.