Virtual show | SEMICONDUCTORS & ELECTRONICS

MULTI-DOF technology for positioning accuracy better than 200 nm

The accuracy of production equipment plays a vital role in the performance of the manufactured components, especially in the electronics and semiconductor manufacturing industry. The memory and computing capacity of today’s computer chips depend on ever greater accuracy in front-end and downstream back-end production processes, including hybrid bonding and advanced packaging.

WINGLET Software

How can you easily optimize highly complex motion systems? With the WINGLET software developed by ETEL. Whether during initial setup or for testing and readjustment when used in facilities for the production of semiconductors and electronic components, it ensures a perfect system setup for maximum performance.

CHARON2 HD and Z3TM+ 

Greater productivity and a higher degree of accuracy are made possible by the interplay of the highly dynamic CHARON2 HD motion system and the Z3TM+ module. This combination delivers motion control in six degrees of freedom and a special lifting mechanism for easier wafer handling.

Enter a new dimension of accuracy with encoders that measure up to six degrees of freedom

Discover encoders that measure more than a single degree of freedom, including the LIP 6000 Dplus and the new GAP 1000. The additional feedback from their MULTI-DOF TECHNOLOGY results in far greater measurement accuracy, letting you detect and compensate for system-relevant positional error in multiple dimensions.

PP 6000: two measuring directions for greater accuracy

Abbé errors have a negative effect on machine tool accuracy. Measuring them is normally difficult, but not with the PP 6000 two-coordinate encoder. Using a single scanning head, this encoder measures two directions simultaneously across a 464 mm x 464 mm field, with larger fields available upon request. By measuring the tool center point directly, it allows you to minimize Abbé errors and improve the accuracy of your machine. Its dual position feedback is transmitted over a single cable using the EnDat 3 interface, thereby reducing your cabling and setup work. Optimize the dynamic behavior of your motion system with the PP 6000.

New

LIP 6000 Dplus: one scale, one scanning head and two degrees of freedom

The LIP 6000 Dplus uses a single scale with two separate graduations angled diagonally at +45° and –45°. A special scanning head with a scanning field for each graduation measures the primary direction X and the secondary direction Y along the entire measuring length. Thanks to the EnDat 3 interface, this dual position feedback is sent to the control via a single cable. This significantly reduces cabling, simplifies installation, and optimizes the motion system’s dynamic performance.

The easy way to check your machine’s accuracy: our calibration tool based on the LIP 6000 Dplus

Inspect and adjust your machine anytime using our calibration tool based on the LIP 6000 Dplus. Calibrating your machines isn’t a daily event, so you can also rent our tool as a HEIDENHAIN service without needing to purchase and maintain one of your own. Our certified calibration tool is a convenient way to check the accuracy of your systems on an as-needed basis.

New

GAP 1081: out-of-plane gap measurement

The new GAP 1081 is the first gap encoder from HEIDENHAIN. It measures the vertical gap between a special mirror and the encoder's scanning head. The GAP 1081 can be used for vertical positioning tasks, or it can be installed parallel to a linear encoder, such as the LIP 6000 Dplus, for continuous vertical measurement along a linear axis. Mirrors for the GAP 1081 are available in lengths of up to 3 m. And if two scanning heads are used on a single mirror, then both the pitch and yaw of the axis can be measured.

Where accuracy meets throughput:
discover new solutions for electronics and semiconductor manufacturing
at the HEIDENHAIN Semiconductor Event 2024.

Easily utilize full encoder accuracy in your application.

MRP 8081 Dplus: take full advantage of your encoder’s accuracy

Despite your encoder’s certified accuracy and calibration chart, you may not be using its full accuracy within your application. There are many possible reasons for this, especially when the encoder is mounted to insufficiently rigid parts. The MRP 8081 Dplus with TRANSFERABLE ACCURACY ensures that the specified accuracy isn’t diminished by the application. This technology utilizes the following features:

  • A highly robust bearing unit
  • Four scanning heads
  • A calibration-relevant data set for your control

Thanks to these features, the MRP 8081 Dplus achieves a system accuracy of up to ±0.2 arc seconds, regardless of the given mounting circumstances, tilting loads or other external factors such as vibrations, sudden physical loads and temperature fluctuations. This increases both accuracy and performance, allowing you to increase your motor’s speed without sacrificing accuracy.

In addition to high-accuracy angular measurement, the four scanning heads of the MRP 8081 Dplus also measure the radial guideway inaccuracy of an axis. In the future, special electronics for analyzing the four scanning heads will allow you to compensate for this as well.

New

Heavy-duty axes: unfazed by cogging torques or radial forces

The combination of an MRP angle encoder module from HEIDENHAIN and a torque motor from ETEL enables exceptionally smooth motion control. Neither disruptive cogging torques nor radial forces impair the bearing’s high guideway accuracy. Also available are the SRP 5000 angle encoder modules, highly compact systems featuring a low profile and high rigidity. The high rigidity of their components also ensures consistent accuracy under varying loads.

Exposed HEIDENHAIN encoders for dynamic rotary axes: the ERO 2000 and, now with MULTI-DOF TECHNOLOGY, the ERP 1080 Dplus

Electronics and semiconductor manufacturing is a dynamic industry. HEIDENHAIN accounts for its rapid pace of change through continual development of its exposed encoders. This has given rise to the ERO 2000 incremental angle encoder, designed specifically for tight spaces and high dynamic performance requirements, as found in Galvanometer optical scanners. There is also the ERP 1000, with its very high accuracy and resolution. And one of its variants, the ERP 1080 Dplus, featuring four scanning heads, delivers the same robustness and installation benefits as the MRP 8081 Dplus angle encoder module.

Bus operation with EnDat 3: fast, convenient, and economical

EnDat 3 is the ideal encoder interface for achieving high system integration while meeting the requirements of future digitalization, including in bus operation. EnDat 3 reduces cabling and puts extensive diagnostic capabilities at your disposal for greater safety and reliability in your automated systems. The interface’s universal communication technology transmits an extensive range of data beyond position feedback, including sensor data, system monitoring data, and data for automatic configuration.

For highly dynamic direct drive motors: modular encoders from RSF for maximum flexibility

Featuring a modular design, linear and angle encoders from RSF provide maximum flexibility for easy integration into your system. This includes a wide variety of interfaces to all common controls and a variety of physical designs. Further benefits include wide mounting tolerances and easy installation. The new MCR 16 angle encoder from RSF represents a further enhancement in signal quality. 

LIC 3000: exposed encoder from HEIDENHAIN for highly dynamic linear axes

The LIC 3000 series is joining the familiar series of LIC 4000 and LIC 2000 exposed absolute linear encoders. The LIC 3000 combines very small measuring steps of just 10 nm with traversing speeds of up to 600 m/min. The LIC 3000 linear encoders enable highly dynamic and precise position measurement on linear axes with measuring lengths of up to 10 m.

A large scanning field makes the LIC 3000 highly resistant to contamination. Localized impurities on the measuring standard have minimal effect on the signal quality and measurement reliability. Thanks to their dynamic performance, long measuring lengths, and robustness, the exposed linear encoders of the LIC 3000 series are particularly versatile, bringing the advantages of LIC encoders to even more applications.

Ultra-flat linear encoders: LIKgo and LIKselect from NUMERIK JENA

The LIKgo and LIKselect exposed linear encoders from NUMERIK JENA are ideal for tight installation spaces and high accuracy requirements.

The standard model, the LIKgo, is particularly small and lightweight. Its scanning head is a mere 28 mm x 13 mm x 7.5 mm in size and weighs only 10 g. The encoder’s newly developed two-field scanning method with a 20 µm grating period and measuring steps of down to 78.125 nm is extremely precise, delivers high signal quality, and is resistant to contamination.

For customized designs, the LIKselect encoders combine these benefits with the strengths of the Kit L series from NUMERIK JENA, giving you highly configurable encoders for your individual requirements.

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