The multi-axis TELICA platforms are specially designed for advanced packaging applications in back-end semiconductor processes, including hybrid bonding, thermocompression bonding, and fan-out applications. The latest generation of the TELICA HP is a fully integrated system featuring a dual gantry architecture, the QUIET active isolation system, the latest ACCURET control technology from ETEL, and MULTI-DOF linear encoders from HEIDENHAIN. At an output of 5000 units per hour, the TELICA HP exhibits accuracies of 1 µm or better, position stability better than 15 nm, and tool-center-point repeatability better than 50 nm over 25 mm.

Break the accuracy barrier with the TELICA HP, and benefit from HEIDENHAIN GROUP solutions that combine accuracy with dynamic performance, practical value, and reliability.

Discover an angle encoder that also delivers linear feedback: The ERO 2900 Dplus is introducing the multidimensional feedback of MULTI-DOF TECHNOLOGY to the world of angle encoders. In addition to its scale drum and scanning head, the ERO 2900 Dplus features a linear track read by an additional scanning head. As a result, the encoder measures not only the angular position of an axis but also its linear travel. This extra functionality is a decisive advantage in applications such as compact bond heads, where complex rotational and linear movements can be tracked with a single encoder alone.

The LIP 6000 Dplus uses a single scale with two separate graduations angled diagonally at +45° and –45°. A special scanning head with a scanning field for each graduation measures the primary direction X and the secondary direction Y along the entire measuring length. Thanks to the EnDat 3 interface, this dual position feedback is sent to the control via a single cable. This significantly reduces cabling, simplifies installation, and optimizes the motion system’s dynamic performance.

The new GAP 1081 is the first gap encoder from HEIDENHAIN. It measures the vertical gap between a special mirror and the encoder's scanning head. The GAP 1081 can be used for vertical positioning tasks, or it can be installed parallel to a linear encoder, such as the LIP 6000 Dplus, for continuous vertical measurement along a linear axis. Mirrors for the GAP 1081 are available in lengths of up to 3 m. And if two scanning heads are used on a single mirror, then both the pitch and yaw of the axis can be measured.